Ultra-high vacuum equipments
Molecular Beam Epitaxy : MBE “MBE-Dai”
- FT-IR (Bruker Optics Vertex 70)
- RHEED-gun (Vieetech VE052)
- RHEED Image analysis system (K-space KSA400)
- Q-mass x2 (Spectra MONITORR; SRS RGA100)
- LEED-AES (OCI BDL-600IR)
- K-cell x3 (EPI)
- Multi(x3) E-gun (Vieetech)
- Sputter-gun (ULVAC-PHI USG3)
- Ion-source (SPECS IQE 12/38)
Schematic Diagram
Molecular Beam Epitaxy “MBE-Jr.”
- FT-IR (Bomem MB100)
- RHEED-gun (Vieetech VE052)
- RHEED Image analysis system (K-space KSA400)
- Q-mass (Spectra MONITORR)
- E-gun (Vieetech)
- Sputter-gun (Omegatron OMI-0010)
- Arc-plasma gun (ULVAC APS-1)
Schematic Diagram
Molecular Beam Epitaxy “B-NEDO”
- FT-IR (Bomen MB100)
- LEED (OCI BDL-400IR)
- Evaporation source x2 (AVC)
- Arc-plasma gun (ADVANCE-RIKO APS-1)
- Sputter-gun (Omegatoron OMI-0043CKE)
Schematic Diagram
UHV Arc-plasma-deposition ”APD”
- Arc-plasma gun x3 (ADVANCE-RIKO APS-1)
- RHEED-gun (AVC RDA-005G)
- E-gun (AVC)
- Sputter-gun (PSP ISIS3000)
Schematic Diagram
UHV Scanning Tunneling Microscopy “UHV-STM” (D3)
- Arc-plasma gun x3 (ADVANCE-RIKO APS-1)
- RHEED-gun (AVC RDA-005G)
- E-gun (AVC)
- Sputter-gun (PSP ISIS3000)
Schematic Diagram
Electrochemical Measurement Systems・Surface Structural Evaluation Systems
Scanning Probe Microscope “SPM”
- Bruker Nano MultiMode + halcyonic nano20
Electrochemical Scanning Tunneling Microscope “EC-STM”
- Bruker Nano MultiMode + Bruker ECM-3
Scanning Tunneling Microscope ”NaioSTM”
- Shimazu GC-2014 + Toho Technical Research PS-14 Detector:TCD & FID
Glove Box + Electrochemical Measurement system “Glove Box”
